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Christopher Lyle Borst | lit.salon

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Christopher Lyle Borst

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology2002
With Christopher L. Borst, William N. Gill, Ronald J. Gutmann

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology2002
With Christopher L. Borst, William N. Gill, Ronald J. Gutmann
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