Ronald J. Gutmann

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Books by Ronald J. Gutmann (50 max)

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology

2002

Christopher L. Borst, Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann

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Copper-fundamental mechanisms for microelectronic applications

2000

S. P Murarka, Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann