Copper-fundamental mechanisms for microelectronic applications
by S. P Murarka, Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann
2000337 pages
John Wiley·3 editions
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Copper-fundamental mechanisms for microelectronic applications (2000)
Copper-fundamental mechanisms for microelectronic applications (2000)
John Wiley
John Wiley
ISBN 10: 0471252565