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Christopher L. Borst | lit.salon
Christopher L. Borst
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Books by Christopher L. Borst (50 max)
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology
2002
Christopher L. Borst, Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann
