Pulsed and pulsed bias sputtering
by Edward V. Barnat, Toh-Ming Lu
2003155 pages
Kluwer Academic·5 editions
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Pulsed and pulsed bias sputtering (2003)
Pulsed and pulsed bias sputtering (2003)
Kluwer Academic
Kluwer Academic
ISBN 10: 140207543X