Integrated Processing for Micro- And Optoelectronics
by Symposium D on Integrated Processing for Micro- and Optoelectronics (1993 Strasbourg, France), Symposium d on Beam Processing and Laser Chemistry, Avishay Katz, Yves I. Nissim
19941 pages
North-Holland·2 editions
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Integrated Processing for Micro- And Optoelectronics (1994)
Integrated Processing for Micro- And Optoelectronics (1994)
North-Holland
North-Holland
ISBN 10: 0444819835
ISBN 13: 9780444819833