Micromachining and microfabrication process technology XIV
by Mary Ann Perez-Maher, Jung-Chih Chiao, Paul J. Resnick
2009
SPIE·1 editions
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Micromachining and microfabrication process technology XIV (2009)
Micromachining and microfabrication process technology XIV (2009)
SPIE
SPIE
ISBN 10: 0819474509
ISBN 13: 9780819474506