Micromachining and microfabrication process technology XVII
by Mary Ann Perez-Maher, Paul J. Resnick
2012
SPIE·1 editions
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Micromachining and microfabrication process technology XVII (2012)
Micromachining and microfabrication process technology XVII (2012)
SPIE
SPIE
ISBN 10: 0819488917
ISBN 13: 9780819488916