Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)
by Maurice H. Francombe, John L. Vossen
1994328 pages
Academic Press·1 editions
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Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18) (1994)
Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18) (1994)
Academic Press
Academic Press
Hardcover
ISBN 10: 0125330189
ISBN 13: 9780125330183