Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
by Seongbo Shim, Youngsoo Shin
2018138 pages
Springer·2 editions
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (2018)
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (2018)
Springer
Springer
hardcover
ISBN 10: 3319762931
ISBN 13: 9783319762937