Micromachining of elements with optical and other submicrometer dimensional and surface specifications
by Manfred Weck
1987159 pages
SPIE·1 editions
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Micromachining of elements with optical and other submicrometer dimensional and surface specifications (1987)
Micromachining of elements with optical and other submicrometer dimensional and surface specifications (1987)
SPIE
SPIE
ISBN 10: 0892528389