Enabling technology for MEMS and nanodevices
by Henry Baltes, Oliver Brand, Gary K. Fedder, Jan G. Korvink
2004427 pages
Wiley-VCH·4 editions
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Enabling technology for MEMS and nanodevices (2004)
Enabling technology for MEMS and nanodevices (2004)
Wiley-VCH
Wiley-VCH
ISBN 10: 352730746X