Reliability of MEMS (Advanced Micro and Nanosystems)
by Gary K. Fedder, Jan G. Korvink, Osamu Tabata
2008324 pages
Wiley-VCH·6 editions
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Reliability of MEMS (Advanced Micro and Nanosystems) (2008)
Reliability of MEMS (Advanced Micro and Nanosystems) (2008)
Wiley-VCH
Wiley-VCH
Hardcover
ISBN 10: 3527314946
ISBN 13: 9783527314942