Advances in CMP/polishing technologies for the manufacture of electronic devices
by Toshiro K. Doi, Ioan D. Marinescu, Syuhei Kurokawa
2012317 pages
Elsevier·1 editions
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Advances in CMP/polishing technologies for the manufacture of electronic devices (2012)
Advances in CMP/polishing technologies for the manufacture of electronic devices (2012)
Elsevier, William Andrew
Elsevier, William Andrew
ISBN 10: 1437778593
ISBN 13: 9781437778595