Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV
by Hark Hoe Tan
2008
SPIE·1 editions
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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV (2008)
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV (2008)
SPIE
SPIE
ISBN 10: 0819469718
ISBN 13: 9780819469717