Micromachines as Tools for Nanotechnology (Microtechnology and MEMS)
2003212 pages
Springer·1 editions
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Micromachines as Tools for Nanotechnology (Microtechnology and MEMS) (2003)
Micromachines as Tools for Nanotechnology (Microtechnology and MEMS) (2003)
Springer
Springer
Hardcover
ISBN 10: 354000856X
ISBN 13: 9783540008569