Integrated Micro-Motion Systems: Micromachining, Control, and Applications
by Fumio Harashima
1990474 pagesElsevier Science Ltd·1 editions No users with this book on their shelves. Maybe you could be the first.
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Integrated Micro-Motion Systems: Micromachining, Control, and Applications (1990)
Integrated Micro-Motion Systems: Micromachining, Control, and Applications (1990)
Elsevier Science Ltd
Elsevier Science Ltd
ISBN 10: 0444884173
ISBN 13: 9780444884176
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