Optical Admittance Loci Monitoring for Thin Film Deposition
by Cheng-Chung Lee, Kai Wu, Tzu-Ling Ni
2012148 pages
LAP Lambert Academic Publishing·1 editions
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Optical Admittance Loci Monitoring for Thin Film Deposition (2012)
Optical Admittance Loci Monitoring for Thin Film Deposition (2012)
LAP Lambert Academic Publishing, LAP LAMBERT Academic Publishing
LAP Lambert Academic Publishing, LAP LAMBERT Academic Publishing
paperback
ISBN 10: 3659001988
ISBN 13: 9783659001987