Advanced etch technology for nanopatterning
by Ying Zhang, G. S. Oehrlein, Qinghuang Lin
2012
SPIE·1 editions
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Advanced etch technology for nanopatterning (2012)
Advanced etch technology for nanopatterning (2012)
SPIE
SPIE
ISBN 10: 0819489840
ISBN 13: 9780819489845