Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
by M. Elwenspoek, H. V. Jansen
2004419 pages
Cambridge University Press·1 editions
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Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) (2004)
Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) (2004)
Cambridge University Press
Cambridge University Press
Paperback
ISBN 10: 0521607671
ISBN 13: 9780521607674