Device and process technologies for MEMS, microelectronics, and photonics III
by Jung-Chih Chiao, Alex Hariz, Jamieson, David, Vijay Varadan
2004566 pages
SPIE·1 editions
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Device and process technologies for MEMS, microelectronics, and photonics III (2004)
Device and process technologies for MEMS, microelectronics, and photonics III (2004)
SPIE
SPIE
ISBN 10: 081945169X