Surface scattering and diffraction for advanced metrology II
by Zu-Han Gu, Alexei A. Maradudin
2002186 pages
SPIE·1 editions
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Surface scattering and diffraction for advanced metrology II (2002)
Surface scattering and diffraction for advanced metrology II (2002)
SPIE
SPIE
ISBN 10: 0819445479