Design, Test, and Microfabrication of Mems and Moems
by SPIE, Selden B. Crary, Wolfgang Ehrfeld, Hiroyuki Fujita
19991192 pages
SPIE-International Society for Optical Engine·1 editions
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Design, Test, and Microfabrication of Mems and Moems (1999)
Design, Test, and Microfabrication of Mems and Moems (1999)
SPIE-International Society for Optical Engine, SPIE
SPIE-International Society for Optical Engine, SPIE
Paperback
ISBN 10: 0819431540
ISBN 13: 9780819431547