Microelectronic structures and MEMS for optical processing III
by M. Edward Motamedi, Hans Peter Herzig
1997214 pages
SPIE·1 editions
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Microelectronic structures and MEMS for optical processing III (1997)
Microelectronic structures and MEMS for optical processing III (1997)
SPIE
SPIE
ISBN 10: 081942658X