Mechanical Microsensors (Microtechnology and MEMS)
by M. Elwenspoek, R. Wiegerink
2000296 pages
Springer·3 editions
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Mechanical Microsensors (Microtechnology and MEMS) (2001)
Mechanical Microsensors (Microtechnology and MEMS) (2001)
Springer
Springer
Hardcover
ISBN 10: 3540675825
ISBN 13: 9783540675822