Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II: Mathematics, Physics and Chemistry, 55)
1899363 pages
Kluwer Academic·2 editions
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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II: Mathematics, Physics and Chemistry, 55) (1899)
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II: Mathematics, Physics and Chemistry, 55) (1899)
Kluwer Academic
Kluwer Academic
Paperback
ISBN 10: 1402005253
ISBN 13: 9781402005251