Advances in mirror technology for X-ray, EUV lithography, laser and other applications
by Ali M. Khounsary, Udo Dinger
2004222 pages
SPIE·2 editions
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Advances in mirror technology for X-ray, EUV lithography, laser and other applications (2004)
Advances in mirror technology for X-ray, EUV lithography, laser and other applications (2004)
SPIE
SPIE
ISBN 10: 0819450669