Microelectromechanical Systems
by National Research Council Staff, Engineering and Technical Systems Commission, Division on Engineering and Physical Sciences Staff, National Materials Advisory Board
199776 pages
National Academies Press·2 editions
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Microelectromechanical Systems (2000)
Microelectromechanical Systems (2000)
National Academies Press
National Academies Press
Paperback
ISBN 10: 0309059801
ISBN 13: 9780309059800