Optical metrology and inspection for industrial applications
by Kevin G. Harding, Peisen S. Huang, Tōru Yoshizawa
2010
SPIE·1 editions
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Optical metrology and inspection for industrial applications (2010)
Optical metrology and inspection for industrial applications (2010)
SPIE
SPIE
ISBN 10: 0819483850
ISBN 13: 9780819483850