Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V
by Michael T. Postek, Victoria Anne Coleman
2011
SPIE·1 editions
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Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V (2011)
Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V (2011)
SPIE
SPIE
ISBN 10: 0819487155
ISBN 13: 9780819487155