Microelectromechanical systems--materials and devices III
by Jörg Bagdahn
2010211 pages
Materials Research Society·2 editions
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Microelectromechanical systems--materials and devices III (2010)
Microelectromechanical systems--materials and devices III (2010)
Materials Research Society
Materials Research Society
ISBN 10: 1605111953
ISBN 13: 9781605111957