Instrumentation, metrology, and standards for nanomanufacturing III
2009
SPIE·1 editions
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Instrumentation, metrology, and standards for nanomanufacturing III (2009)
Instrumentation, metrology, and standards for nanomanufacturing III (2009)
SPIE
SPIE
ISBN 10: 0819476951
ISBN 13: 9780819476951