Instrumentation, metrology, and standards for nanomanufacturing II
2008200 pages
SPIE·1 editions
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Instrumentation, metrology, and standards for nanomanufacturing II (2008)
Instrumentation, metrology, and standards for nanomanufacturing II (2008)
SPIE, Society of Photo Optical
SPIE, Society of Photo Optical
ISBN 10: 081947262X
ISBN 13: 9780819472625